| Title: | OSA proceedings on soft x-ray projection lithography: proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California
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| Author: | Andrew M Hawryluck (books written by Andrew M Hawryluck) |
| Year: | 1993 |
| ISBN-10: | 1-55752-304-5 / 1557523045 (similar ISBNs) |
| ISBN-13/EAN: | 9781557523044 |
| Tags: | andrew california hawryluck lithography meeting monterey proceedings projection soft topical |
| Previous book: | OSA proceedings on picosecond electronics and optoelectronics: proceedings of the topical meeting, March 13-15, 1991, Salt Lake City, Utah |
| Next book: | OSA proceedings on tunable solid state lasers: proceedings of the OSA topical meeting, May 1-3, 1989, North Falmouth, Cape Cod, Massachusetts |

